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Oakland University Logo
    Oakland University
  Dec 12, 2017
2017-2018 Undergraduate Catalog
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ECE 4135 - Integrated Electronics

Modern microelectronics processes and fabrication of integrated circuits. Crystal growth, wafer preparation, photo lithography, dielectric and polysilicon film deposition, epitaxial growth, oxidation, diffusion, ion implementation, etching, metallization and integrated circuits layout principles. Introduction to MOS-based and bipolar transistor-based microcircuits design and fabrication. Fabrication processing simulation using SUPREM. With laboratory and projects.(Formerly ECE 487)
Prerequisite(s): (ECE 484 or ECE 4130)

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