ECE 5135 - Integrated Electronics

(4 credits)

Modern microelectronics processes and fabrication of integrated circuits. Crystal growth and wafer preparation, photolithography, dielectric and polysilicon film deposition, epitaxial growth, oxidation, diffusion, ion implantation, etching, metallization and integrated circuits layout principles. Introduction to MOS-based and bipolar junction transistor-based microcircuits design and fabrication. Fabrication processing simulation using SUPREM, with projects. Previously EE 587, ECE 587. Credit cannot be received for more than one of EE 587, ECE 587, ECE 5135.Offered winter, even years.

Course revisions made after the Graduate Catalog publication date will be posted in the Graduate Catalog Addendum.