ECE 4134 - Fundamentals of MEMS

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Micro-electro-mechanical Systems (MEMS) specifications, MEMS materials, materials mechanics, MEMS fabrication technologies, lumped-element method and MEMS device modeling and dynamics, energy transductions for sensing and actuations, case study on sensors and actuators. Finite element analysis (FEA) for MEMS structural design, with projects. ECE 4134 to be cross-listed with ECE 5134.
Prerequisite(s): ECE 3105