ECE 487 - Integrated Electronics

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Modern microelectronics processes and fabrication of integrated circuits. Crystal growth, wafer preparation, photolithography, dielectric and polysilicon film deposition, epitaxial growth, oxidation, diffusion, ion implantation, etching, metallization and integrated circuits layout principles. Introduction to MOS-based and bipolar transistor-based microcircuits design and fabrication. Fabrication processing simulation using SUPREM. With laboratory and projects.
Prerequisite(s): ECE 384 and major standing.