ECE 583 - Fundamentals of MEMS

(4 credits)

This course offers fundamentals of Micro-electro-mechanical Systems that involve multidisciplinary topics. In addition to systematic study of transduction principles and microfabrication technologies, variety of micro-scale transducers, including sensors and actuators, will be exemplified in detailed case study. This design-oriented course employs advanced MEMS and circuit simulation software for structural and circuit design of the MEMS devices. Students also have the chance to fabricate their designed sensors and actuators through commercial or custom microfabrication.