ECE 487 - Integrated Electronics

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Modern microelectronics processes and fabrication of integrated circuits. Crystal growth, wafer preparation, photo lithography, dielectric and polysilicon film deposition, epitaxial growth, oxidation, diffusion, ion implementation, etching, metallization and integrated circuits layout principles. Introduction to MOS-based and bipolar transistor-based microcircuits design and fabrication. Fabrication processing simulation using SUPREM. With laboratory and projects.
Prerequisite(s): ECE 484 or ECE 384.